Title:
インプリントモールドの製造方法
Document Type and Number:
Japanese Patent JP5150926
Kind Code:
B2
Inventors:
Morihisa Homoto
Application Number:
JP2011153708A
Publication Date:
February 27, 2013
Filing Date:
July 12, 2011
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01L21/027; B29C33/38; B29C59/02; B81C99/00; G03F1/50
Domestic Patent References:
| JP2008221552A | ||||
| JP2007042969A | ||||
| JP2007180315A | ||||
| JP2009532908A | ||||
| JP2006212859A | ||||
| JP2011116032A |
Foreign References:
| WO2011062215A1 |
Attorney, Agent or Firm:
Junzo Yoneda
Masataka Ota
Hideo Sarada
Masataka Ota
Hideo Sarada