Title:
IMPRINTING METHOD FOR THREE-DIMENSIONAL MICRO- OR NANO-STRUCTURE SUPPORTED AND INDEPENDENT
Document Type and Number:
Japanese Patent JP2011011558
Kind Code:
A
Abstract:
To provide a method for assembling a 3D polymer structure, which is structured to have characterized goods in the size of a range from a nanoscale to a microscale.
The method for assembling the 3D polymer structure includes (a) the step of forming the first 3D polymer structure on a substrate, (b) the step of forming the second 3D polymer structure in a surface-treated mold, (c) the step of connecting the first and second 3D polymer structures, and (d) the steps of separating the surface-treated mold from the second 3D polymer structure, and forming the assembling structure made of the second 3D polymer structure on the first 3D polymer structure.
Inventors:
KONG YEN PENG
LOW HONG YEE
PANG STELLA W
YEE ALBERT F
LOW HONG YEE
PANG STELLA W
YEE ALBERT F
Application Number:
JP2010226766A
Publication Date:
January 20, 2011
Filing Date:
October 06, 2010
Export Citation:
Assignee:
AGENCY FOR SCIENCE TECH & RES
UNIV MICHIGAN
UNIV MICHIGAN
International Classes:
B29C59/02; B28B11/08; B81C1/00; B81C99/00; B82B1/00; B82B3/00; G03C5/00; G03F7/00; H01L21/027
Domestic Patent References:
| JP2005153091A | 2005-06-16 | |||
| JPH10329213A | 1998-12-15 | |||
| JP2004504718A | 2004-02-12 | |||
| JP2005524984A | 2005-08-18 | |||
| JP2004363584A | 2004-12-24 | |||
| JP2005515617A | 2005-05-26 | |||
| JP2004188822A | 2004-07-08 |
Foreign References:
| US6860956B2 | 2005-03-01 | |||
| US20040219249A1 | 2004-11-04 | |||
| US5512131A | 1996-04-30 |
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Mitsuo Tanaka