To provide an imprinting mold which reduces destruction of a mold pattern in an imprinting method, and its manufacturing method.

In the imprinting mold, at least the corners of the recessed parts of the uneven patterns of the mold are formed into a round shape. When releasing the mold in imprinting, the stress concentration in a mold material can be relaxed. Accordingly, the destruction of the mold pattern can be reduced. The destruction of the mold pattern can be reduced even in pattern transfer of a high aspect ratio.