IMPROVED APPARATUS FOR PRODUCING AND SUSTAINING GLOW DISCHARGE PLASMA UNDER ATMOSPHERIC CONDITION

Japanese Patent JP2004134376

A

To produce and sustain an atmospheric pressure glow discharge plasma stably and uniformly.

This apparatus (20) for producing and sustaining a glow discharge plasma in a plasma discharge space (11) comprises opposing electrodes (13, 14); a gas supply means (12) for supplying a gas or a gas mixture under atmospheric pressure conditions into the discharge space; an AC power supply means (15) for energizing the electrodes; and an electric stabilization means (21) for stabilizing current variations in the plasma. The stabilization means is connected between the electrodes and the power supply means, and is configured to be capable of opposing current variations of within 1 microsecond generated in the plasma.

DE VRIES HINDRIK WILLEM
MORI FUYUHIKO
ALDEA EUGEN
VAN DE SANDEN MAURITIUS CORNEL

JP2003273106A

April 30, 2004

July 10, 2003

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FUJI PHOTO FILM BV

B01J19/08; C23F4/00; H01J37/32; H01L21/205; H05H1/24; H05H1/46; (IPC1-7): H05H1/24; B01J19/08; C23F4/00; H01L21/205; H05H1/46

JPH08330095A	1996-12-13
JPH09279337A	1997-10-28
JPH11288796A	1999-10-19
JPS6130665A	1986-02-12
JPH0714686A	1995-01-17
JPH1033976A	1998-02-10
JPH1036537A	1998-02-10
JPH10154598A	1998-06-09
JPH07505974A	1995-06-29

US5895558A	1999-04-20
US4679007A	1987-07-07
US5882492A	1999-03-16
WO2001031681A1	2001-05-03
US5095247A	1992-03-10

Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Shinya Mitsuhiro

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