IMPROVED METHOD FOR SEPARATION AND RECOVERY OF GASEOUS PERFLUORO COMPOUND AND APPARATUS THEREFOR

Title:

IMPROVED METHOD FOR SEPARATION AND RECOVERY OF GASEOUS PERFLUORO COMPOUND AND APPARATUS THEREFOR

Document Type and Number:

Japanese Patent JPH10298118

Kind Code:

A

Abstract:

To provide a method suitable for recovering at least one kind of gaseous perfluoro compound from a gaseous mixture.

This method provides a gaseous mixture containing at least one kind of gaseous perfluoro compound and at least one kind of carrier gas and having a prescribed pressure, and provides at least one size-selective membrane having a supplying side and a permeation side. The supplying side of the membrane is brought into contact with a gaseous mixture and a condensed gaseous mixture comprising substantially at least one kind of gaseous perfluoro compound is taken out as a non-permeation flow having a pressure equal to the prescribed pressure from the supplying side of the membrane, then a deficient gas comprising substantially at least one kind of carrier gas is taken out as a permeation flow from the permeation side of the membrane.

Inventors:

LI YAO-EN
PAGANESSI JOSEPH
VASSALLO DAVID
FLEMING GREGORY K

Application Number:

JP702198A

Publication Date:

November 10, 1998

Filing Date:

January 16, 1998

Export Citation:

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Assignee:

AIR LIQUIDE

International Classes:

B01D53/68; B01D53/00; B01D53/02; B01D53/22; B01D53/32; B01D63/02; B01D71/48; B01D71/50; B01D71/56; B01D71/62; B01D71/64; B01D71/68; C01B17/45; C07C17/38; C07C17/389; C07C19/08; (IPC1-7): C07C19/08; C01B17/45; C07C17/389

Domestic Patent References:

JPH10128034A	1998-05-19
JPH09103633A	1997-04-22

Attorney, Agent or Firm:

Takehiko Suzue (4 outside)

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