Title:
改良された光応力発生器及び検出器
Document Type and Number:
Japanese Patent JP4393585
Kind Code:
B2
Abstract:
Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects.
Inventors:
Maris Humphrey Jay.
Stoner Robert Jay.
Stoner Robert Jay.
Application Number:
JP52685297A
Publication Date:
January 06, 2010
Filing Date:
December 31, 1996
Export Citation:
Assignee:
Brown University Research Foundation
International Classes:
B82B1/00; G01N21/21; G01N21/17; G01N21/55; G01N21/59; G01N29/00; G01N29/24
Foreign References:
| US4710030 |
Other References:
A.R.Duggal外2名,“Real-time optical characterization of surface acoustic modes of polyimide thin-film coatings”, Journal of Applied Physics, Volume 72, Issue 7, 1992年10月1日, pp.2823-2839
Attorney, Agent or Firm:
Motohiko Fujimura