Title:
IMPROVED VACUUM GAUGE
Document Type and Number:
Japanese Patent JP2511201
Kind Code:
B2
Abstract:
PURPOSE: To ensure reproducibility and stability of sensitivity by fixing the path of an electron directed from a cathode toward an electron collecting means.
CONSTITUTION: A tubular object is provided with an external electrode 12 and an anode 14 and a solid electron collector 18 disposed on the periphery of the anode 14 collects ionized electrons passing through the inner space of the anode 14. A cathode 20 disposed on the outside of the anode 14 has an inlet slot 26 provided by a cathode shielding plate 22 and emits electrons toward an imaginary axis 2 thus obtaining an electron path 24 from the cathode 20 to the collector 18. Since a part of an emitted electron flow passing through a narrow slot 26 is constant in an instrument and all electrons directed toward the axis 2 pass through the same path, ionization energy is made constant and the ion collection rate s also made constant so long as positive ions are generated along a constant electronic path. Furthermore, electrons can be collected in an extremely small area of the collector 18 and the entire electron path in the ion collecting space is fixed. This arrangement satisfy all requirements and ensures reproducibility and stability of the sensitivity.
Inventors:
DANIERU G BIRUSU
Application Number:
JP7934591A
Publication Date:
June 26, 1996
Filing Date:
April 11, 1991
Export Citation:
Assignee:
GURANBIRU FUIRITSUPUSU CO
International Classes:
G01L21/30; H01J41/04; (IPC1-7): G01L21/30
Domestic Patent References:
| JP59225326A | ||||
| JP4021319B1 |
Attorney, Agent or Firm:
Hiroshi Maeda