IMPROVEMENT IN PERFORMANCE IN MODEL-BASED OPTICAL PROXIMITY CORRECTION ENGINE UTILIZING EFFICIENT POLYGON PINNING METHOD

Title:

IMPROVEMENT IN PERFORMANCE IN MODEL-BASED OPTICAL PROXIMITY CORRECTION ENGINE UTILIZING EFFICIENT POLYGON PINNING METHOD

Document Type and Number:

Japanese Patent JP2005165282

Kind Code:

A

Abstract:

To provide a method for carrying out model-based optical proximity correction by disposing a mask matrix having a region of interest (ROI) and locating a plurality of points of interest within the mask matrix, and to provide a program storage device for executing the above method.

A first polygon 200 having a plurality of vertices representative of the located points of interest is computed, followed by determining a spatial relationship between the vertices and the ROI 100. The vertices of the first polygon are pinned to boundaries of and within the ROI to form a second polygon 300 on the ROI. This processing is repeated for all vertices of the first polygon to collapse the second polygon on the ROI. The collapsed second polygon is used to correct for optical proximity.

Inventors:

GALLATIN GREGG M
GOFMAN EMANUEL
LAI KAFAI
LAVIN MARK A
MUKHERJEE MAHARAJ
RAMM DOV
ROSENBLUTH ALAN E
SHLAFMAN SHLOMO

Application Number:

JP2004309739A

Publication Date:

June 23, 2005

Filing Date:

October 25, 2004

Export Citation:

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Assignee:

IBM

International Classes:

G03F1/08; G03F1/14; G03F7/20; G06F17/10; G06F17/50; H01L21/00; H01L21/027; (IPC1-7): G03F1/08; G06F17/50; H01L21/027

Attorney, Agent or Firm:

Hiroshi Sakaguchi
Yoshihiro City
Takeshi Ueno

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