Title:
インライン熱処理装置
Document Type and Number:
Japanese Patent JP2014519187
Kind Code:
A
Inventors:
Byung Il
Application Number:
JP2014509242A
Publication Date:
August 07, 2014
Filing Date:
May 02, 2012
Export Citation:
Assignee:
TERASEMICON CORPORATION
International Classes:
H01L21/324; F27B9/20; F27B9/40; F27D19/00
Attorney, Agent or Firm:
Patent business corporation Oshima patent office