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Title:
IN-MAGNETIC FIELD HEAT TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP2013138058
Kind Code:
A
Abstract:

To provide an in-magnetic field heat treatment apparatus which inhibits quench from occurring immediately after a refrigeration machine stops and makes contamination of a clean room caused by a refrigerant gas unlikely to occur.

A superconducting coil 2 is immersed in liquid helium 4 in a sealed refrigerant tank 3 as a solenoid type coil enclosing a through hole 5a of a vacuum insulation container 5. A refrigeration machine 6, which re-condenses a helium gas evaporated in the refrigerant tank 3, is disposed vertically downward, and two cooling ends 6b at a lower end of the refrigeration machine 6 are installed in an upper gas space in the refrigerant tank 3. Even if the refrigerant type superconducting magnet, inhibiting quench from occurring immediately after the refrigeration machine 6 stops, is used and is installed in a clean room, the structure prevents the refrigerant gas from leaking and makes the clean room unlikely to be contaminated.


Inventors:
HIROSE RYOICHI
Application Number:
JP2011287425A
Publication Date:
July 11, 2013
Filing Date:
December 28, 2011
Export Citation:
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Assignee:
JAPAN SUPERCONDUCTOR TECH
International Classes:
H01L21/02; F27B5/05; F27B5/14
Domestic Patent References:
JP2001102211A2001-04-13
JP2004211167A2004-07-29
JPS6028211A1985-02-13
JP2003303713A2003-10-24
JP2006122539A2006-05-18
Attorney, Agent or Firm:
Yoshiyuki Kaji
Makoto Suhara