Title:
ペデスタルヒータを洗浄するためのインシトゥＤＣプラズマ
Document Type and Number:
Japanese Patent JP7418555
Kind Code:
B2
Abstract:
Substrate supports, substrate support assemblies and methods of using an arc generated between a first electrode and a second electrode to clean a support surface. The first electrode comprises a plurality of first branches which are interdigitated with a plurality of branches of the second electrode in a finger-joint like pattern creating a gap between the first electrode and the second electrode.
Inventors:
Uravi, Tejas
Dan, Alcapraba
Barja, Sanjeve
Tan, Wei V.
Dan, Alcapraba
Barja, Sanjeve
Tan, Wei V.
Application Number:
JP2022516284A
Publication Date:
January 19, 2024
Filing Date:
September 18, 2020
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/683; H01L21/205; H01L21/304; H01L21/31
Domestic Patent References:
| JP2003504871A | ||||
| JP20037810A | ||||
| JP9223729A | ||||
| JP2019515505A |
Foreign References:
| US20040233609 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation