Title:
INDIUM TIN OXIDE TARGET, METHOD FOR MANUFACTURING THE SAME, TRANSPARENT CONDUCTIVE FILM OF INDIUM TIN OXIDE, AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2009144238
Kind Code:
A
Abstract:
To provide an indium tin oxide target, a method for manufacturing the indium tin oxide target, a transparent conductive film of indium tin oxide, and a method for manufacturing the transparent conductive film.
The indium tin oxide target includes at least one oxide selected from the group consisting of samarium oxide and ytterbium oxide, wherein an amount of the oxide is 0.5 wt.% to 10 wt.% based on the weight of the target.
Inventors:
Koo, Bon Kyung
IN, Kanko
Park, JU OK
Park, Keiritsu
Kim, Genshu
Sai, Seiryu
Sai, Churetsu
Song, Pung Keun
Park, Joon Hong
IN, Kanko
Park, JU OK
Park, Keiritsu
Kim, Genshu
Sai, Seiryu
Sai, Churetsu
Song, Pung Keun
Park, Joon Hong
Application Number:
JP2008000287622
Publication Date:
July 02, 2009
Filing Date:
November 10, 2008
Export Citation:
Assignee:
SAMSUNG CORNING PRECISION GLASS CO LTD
International Classes:
C23C14/34; C04B35/00; C04B35/447; H01B1/08; H01B5/14; H01B13/00
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