Title:
INDUCTION PLASMA GENERATING DEVICE
Document Type and Number:
Japanese Patent JPH07254496
Kind Code:
A
Abstract:
PURPOSE: To downsize a device by reducing a axial length of a gas injecting part to inject sheath gas.
CONSTITUTION: A gas injecting part 15 arranged between an outer surface of a blow-in tube 13 of seed gas 7 and an inner surface of an insulating tube 11 so as to inject sheath gas 6 in a spiral shape along the inner surface of the insulating tube 11, is arranged in an annular body 15 by penetratingly passing through an injecting hole of the sheath gas 6. The sheath gas outlet side direction of the injecting hole is arranged in its slant posture on the coil 1 side to the circumferential direction of the insulating tube 11.
Inventors:
MIYAMOTO MASAHIRO
YAMADA MAMORU
SAKUTA TADAHIRO
YAMADA MAMORU
SAKUTA TADAHIRO
Application Number:
JP4624994A
Publication Date:
October 03, 1995
Filing Date:
March 17, 1994
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD
SAKUTA TADAHIRO
SAKUTA TADAHIRO
International Classes:
H05H1/30; (IPC1-7): H05H1/30
Attorney, Agent or Firm:
Iwao Yamaguchi
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