Title:
測定デバイスのスタイラスの位置を示すための誘導性位置検出構成体
Document Type and Number:
Japanese Patent JP7256106
Kind Code:
B2
Abstract:
An inductive position detector (IPD) for stylus position measurement in a scanning probe comprises two substrates located along a central axis in the probe with a motion volume therebetween, each including N rotary sensing coils (RSCs) and respective axial sensing coil configurations (ASCC). A stylus-coupled conductive disruptor moves along Z (axial) and X-Y (rotary) directions in the motion volume. A generating coil (GC) generates a changing magnetic flux encompassing the disruptor and coils, and coil signals indicate the disruptor and/or stylus position. Axial projection of the disruptor defines axial sensing overlap area (ASOA) with the ASCC, and rotary sensing overlap areas (RSOAs) with respective RSCs. The IPD is configured such that the ASOA is independent of disruptor position, and N complementary pairs (CPs) of RSCs are provided, wherein the magnitude of the change in the RSOA in the two coils of a CP is the same for any disruptor displacement.
Inventors:
Ted Stanton Cook
Scott Allen Hersila
Scott Allen Hersila
Application Number:
JP2019195673A
Publication Date:
April 11, 2023
Filing Date:
October 28, 2019
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B5/012
Domestic Patent References:
| JP2017111113A | ||||
| JP2008076089A | ||||
| JP61038648A |
Attorney, Agent or Firm:
Patent Attorney Corporation MTS International Patent Office
Previous Patent: Electronic device and its power receiving control method
Next Patent: PRODUCTION OF NOBLE METAL ALLOY CATALYST
Next Patent: PRODUCTION OF NOBLE METAL ALLOY CATALYST