Title:
誘導結合型プラズマ処理装置及び方法
Document Type and Number:
Japanese Patent JP5500097
Kind Code:
B2
Inventors:
Tomohiro Okumura
Ichiro Nakayama
Ichiro Nakayama
Application Number:
JP2011035654A
Publication Date:
May 21, 2014
Filing Date:
February 22, 2011
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H05H1/24; B08B7/00; C23C16/453; H01L21/20; H01L21/265; H05H1/30
Domestic Patent References:
| JP2001077097A | ||||
| JP7245192A | ||||
| JP2785442B2 | ||||
| JP2002069653A | ||||
| JP10189293A | ||||
| JP2007188823A | ||||
| JP2004158247A | ||||
| JP2002093768A | ||||
| JP2004128417A |
Attorney, Agent or Firm:
Tokuda Yoshiaki
Kentaro Fujii
Ikuro Terauchi
Kentaro Fujii
Ikuro Terauchi