INDUCTIVELY DRIVEN PLASMA LIGHT SOURCE - ENERGETIC TECHNOLOGY INC

Title:

INDUCTIVELY DRIVEN PLASMA LIGHT SOURCE

Document Type and Number:

Japanese Patent JP2013012780

Kind Code:

A

Abstract:

To materialize a plasma light source arranged so as to minimize undesired emission substances or radiation (e.g. particles, infrared light and visible light).

A light source 100 comprises: a chamber 104 having a plasma discharge area 112 and including ionic mediums; a magnetic core 108 surrounding part of the plasma discharge area 112; and a pulse-power system 136 for supplying the magnetic core 108 with at least one pulse of energy to feed electric power to plasma formed in the plasma discharge area. The plasma has a locally high-luminance zone 144.

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Inventors:

SMITH DONALD K
HORNE STEPHEN F
MATTHEW M BESEN
PAUL A BLACKBOROUGH

Application Number:

JP2012222005A

Publication Date:

January 17, 2013

Filing Date:

October 04, 2012

Export Citation:

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Assignee:

ENERGETIC TECHNOLOGY INC

International Classes:

H01L21/027; G03F7/20; H05G2/00

Attorney, Agent or Firm:

Shinjiro Ono
Yasushi Kobayashi
Hiroyuki Tomita
Osamu Hoshino
Fujihiro Kanda

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