Title:
INERT GAS ATMOSPHERE FURNACE DEVICE
Document Type and Number:
Japanese Patent JP2009216257
Kind Code:
A
Abstract:
To provide a drying processing device or a firing processing device capable of minimizing an opening for taking in and out a workpiece to prevent or minimize leakage of an inert gas.
An insert gas atmosphere furnace device for processing a processed workpiece under an inert gas atmosphere, is composed of a furnace body and a big door 14, and includes a plurality of workpiece holding means, at least one workpiece transferring opening, a small door 34, a big door moving means 30, a small door opening and closing means, a workpiece transferring robot, a sealing means 20 and a clamp means, and a seal means.
Inventors:
SAITO MISAO
KAWAHARA MASARU
KAWAHARA MASARU
Application Number:
JP2008057734A
Publication Date:
September 24, 2009
Filing Date:
March 07, 2008
Export Citation:
Assignee:
KYOSHIN ENGINEERING KK
International Classes:
F27D7/06; F27B5/04; F27B5/06; F27B9/30; F27B17/00
Attorney, Agent or Firm:
Kazuo Shamoto
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Toru Miyamae
Shinjiro Ono
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Toru Miyamae