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Patent Searching and Data


Title:
活性ガス照射装置
Document Type and Number:
Japanese Patent JP6916331
Kind Code:
B2
Abstract:
A reactive gas application apparatus including an instrument (10) which includes: a plasma generating unit (12); and an outlet (1a) for blowing out a reactive gas activated by plasma, the plasma generating unit (12) including: a tubular dielectric (3) to which a plasma generation gas is introduced; an inner electrode (4) provided inside the tubular dielectric (3), and extending in a tube axis direction (O1) of the tubular dielectric (3); and an outer electrode (5) provided outside the tubular dielectric (3) and faces the inner electrode (4) through the tubular dielectric, wherein the inner electrode (4) has a shaft portion extending in the tube axis direction and a spiral ridge formed on an outer peripheral surface of the shaft portion.

Inventors:
Yuu Nagahara
Takaya Oshita
Yoshishige Takigawa
Tsuyoshi Uehara
Application Number:
JP2020044319A
Publication Date:
August 11, 2021
Filing Date:
March 13, 2020
Export Citation:
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Assignee:
Sekisui Chemical Co.,Ltd.
International Classes:
A61N1/44; A61C19/06
Domestic Patent References:
JP2017050267A
JP2013128681A
JP2014217506A
JP2012528452A
JP2004342331A
Foreign References:
WO2016163007A1
Attorney, Agent or Firm:
Nishizawa Kazumi
Yuichiro Kawagoe
Makiko Otsuki
Hiroshi Yamaguchi