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Title:
イナートガスオーブン
Document Type and Number:
Japanese Patent JP5116074
Kind Code:
B2
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Inventors:
Hirofumi Umemura
Application Number:
JP2006314586A
Publication Date:
January 09, 2013
Filing Date:
November 21, 2006
Export Citation:
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Assignee:
ULVAC, Inc.
International Classes:
F27B5/16; F27B5/18; F27B17/00; F27D7/06; F27D19/00
Domestic Patent References:
JP2006156487A
JP2005156089A
JP61060819A
JP8178536A
JP4039593A
JP2003279261A
JP4340087A
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda



 
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