Title:
Inertia sensor
Document Type and Number:
Japanese Patent JP6002481
Kind Code:
B2
Inventors:
Zhang Yuhua
Chung Nozomi
Seiko Yamanaka
Masahide Hayashi
Chung Nozomi
Seiko Yamanaka
Masahide Hayashi
Application Number:
JP2012152012A
Publication Date:
October 05, 2016
Filing Date:
July 06, 2012
Export Citation:
Assignee:
Hitachi Automotive Systems, Ltd.
International Classes:
G01P15/125; B81B3/00; G01P15/08; H01L29/84
Domestic Patent References:
| JP2010536036A | ||||
| JP2009540280A | ||||
| JP2009109494A | ||||
| JP2008544243A | ||||
| JP2007298410A | ||||
| JP2004340716A | ||||
| JP9189716A |
Foreign References:
| WO2009125510A1 |
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki