To provide an inertial force sensor having improved detection sensitivity.
A detection element 1, when detecting angular velocity, has a constitution for detecting angular velocity, on the basis of a first addition value obtained by adding output values output from an upper electrode 15 of a second sensing electrode 19b and the upper electrode 15 of a fourth sensing electrode 20b which are positive electrodes each other when the angular velocity is generated; a second addition value obtained by adding output values output from the upper electrode 15 of a first sensing electrode 19a and the upper electrode 15 of a third sensing electrode 20a which are negative electrodes each other; a third addition value obtained by adding output values output from a lower electrode 14 of the first sensing electrode 19a and the lower electrode 14 of the third sensing electrode 20a which are positive electrodes each other; and a fourth addition value, obtained by adding the output values output from the lower electrode 14 of the second sensing electrode 19b and the lower electrode 14 of the fourth sensing electrode 20b which mutually become negative electrodes, based on the detection of the angular velocity.
| JP2005249646A | 2005-09-15 | |||
| JPH10170279A | 1998-06-26 | |||
| JP2006023320A | 2006-01-26 | |||
| JPH0894661A | 1996-04-12 | |||
| JPH11230759A | 1999-08-27 |
| WO2008023566A1 | 2008-02-28 |
Hiroki Naito
Daisuke Nagano