Title:
Inertial force sensor
Document Type and Number:
Japanese Patent JP6343102
Kind Code:
B2
Abstract:
Provided is an inertia sensor that can be reduced in size. An inertia sensor having layers 1a, 2a in which detection parts 20, 30 are formed, the inertial sensor being a laminated structure obtained by laminating two or more of the layers.
Inventors:
Desato Sato
Hiroshi Kikuchi
Hiroshi Kikuchi
Application Number:
JP2017542980A
Publication Date:
June 13, 2018
Filing Date:
August 03, 2016
Export Citation:
Assignee:
Hitachi Automotive Systems, Ltd.
International Classes:
G01P15/08; B81B3/00; G01C19/5747; G01C19/5783; G01D21/02; G01L9/00; G01P15/125; G01P15/18; H01L29/84
Domestic Patent References:
| JP5978170B2 |
Attorney, Agent or Firm:
Wilfort International Patent Office