Title:
INERTIAL SENSOR
Document Type and Number:
Japanese Patent JP2006234462
Kind Code:
A
Abstract:
To provide an inertial sensor which assures leak vibration suppression effect and anti-shock performance against external shock vibration of a detection element and can reduce the size.
A sensing element 8 is supported on a flexible resin substrate 7 and the natural frequency of the flexible resin substrate 7 in the state supporting the sensing element 8 is made larger than the difference in the natural frequency in the sensing direction from the natural frequency in the drive direction of the sensing element 8 and smaller range than the lowest frequency excited by the sensing element 8 by external vibration.
Inventors:
NOZOE TOSHIYUKI
OOGOSHI HIDEO
OOGOSHI HIDEO
Application Number:
JP2005046752A
Publication Date:
September 07, 2006
Filing Date:
February 23, 2005
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01C19/56; G01C19/5621; G01C19/5628
Domestic Patent References:
| JPH0989570A | 1997-04-04 | |||
| JPH09170926A | 1997-06-30 | |||
| JP2004271479A | 2004-09-30 | |||
| JP2003028647A | 2003-01-29 | |||
| JP2002257553A | 2002-09-11 | |||
| JP2004309443A | 2004-11-04 | |||
| JP2002071353A | 2002-03-08 | |||
| JPH09133704A | 1997-05-20 | |||
| JPH1123285A | 1999-01-29 |
Attorney, Agent or Firm:
Fumio Iwahashi
Tomoyasu Sakaguchi
Hiroki Naito
Tomoyasu Sakaguchi
Hiroki Naito
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