Title:
INERTIAL SENSOR
Document Type and Number:
Japanese Patent JP2006234463
Kind Code:
A
Abstract:
To provide an inertial sensor which assured leak vibration suppression effect and anti-shock performance against external shock vibration of a detection element and can reduce the size.
A natural frequency of the flexible resin substrate 7 facing the mounting part 71 of a sensing element 8 by way of a spring 72 and having a substrate base 74 arranged so as to have a specific difference of level 73 to the mounting part 71 is constituted to be larger than the difference in the natural frequency in the sensing direction from the natural frequency in the drive direction of the sensing element 8 and smaller range than the lowest frequency excited by the sensing element 8 by external vibration.
Inventors:
NOZOE TOSHIYUKI
OOGOSHI HIDEO
OOGOSHI HIDEO
Application Number:
JP2005046753A
Publication Date:
September 07, 2006
Filing Date:
February 23, 2005
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01C19/56; G01C19/5621; G01C19/5628
Attorney, Agent or Firm:
Fumio Iwahashi
Tomoyasu Sakaguchi
Hiroki Naito
Tomoyasu Sakaguchi
Hiroki Naito