PURPOSE: To manufacture a target having high strength and high density and reduced in oxygen content by infiltrating a porous alloy body having a specific composition consisting of rare earth metal and transition metal with an alloy composed of both metals mentioned above having a specific composition at the time of manufacturing the sputtering target consisting of both metals mentioned above.
CONSTITUTION: At the time of manufacturing a target consisting of rare earth metal and transition metal for use in the formation of a perpendicular magnetic film for magneto-optical recording by means of sputtering, Gd, Tb, Dy, Ho, Er, Tm, or alloys of ≥2 elements among the above are used as rare earth metal material, and, as transition metal, Fe, Co, Ni, or alloys thereof are used. First a sheet-like infiltration material 3 composed of a transition metal-rare earth metal alloy containing, by atom, 45-98% rare earth metal is placed on a porous sheet-like alloy 2 of rare earth metal and transition metal containing ≤10% rare earth metal or transition metal, and then, heating is applied to the above by means of infrared heaters 5 in a vacuum vessel 1 to melt the infiltration material 3 and infiltrate it into the rare earth metal - transition metal material 2, by which the high-strength and high-density composite target having a composition consisting of 20-45atomic% rare earth metal and the balance transition metal and reduced in oxygen content can be obtained.
YOSHIKAWA KAZUO
NISHI SEIJI
SODO TATSUHIKO
MATSUZAKI HITOSHI
KANAYAMA HIROSHI
MIYAMOTO KOUJI
