To solve the problem that an obtained amount of displacement is small and, especially, displacement in a Z-direction cannot be enlarged even if the amount of displacement in a piezoelectric actuator is expanded via a displacement expansion mechanism.

A fixing section 35 is connected with a Z-direction movement section 36 by deflection beams 41a, 41b of a parallel flat plate, the fixing section 35 is connected with a movement section 37 by deflection beams 43a, 43b of the parallel flat plate, and the piezoelectric actuator is provided between the Z-direction movement section 36 and the movement section 37. A Z-direction adjustment screw 7 is rotated and operated, and the movement section 37 is moved in a Y direction, thus moving the Z-direction movement section 36 to a Z direction via a piezoelectric actuator 50 for a coarse movement adjustment. A specific voltage is applied to the piezoelectric actuator 50 to carry out infinitesimal movement adjustment at the Z-direction movement section 6. The movement of the Z-direction adjustment screw 7 is directly transmitted to the Z- direction movement section 36, thus making large the movement range of the Z-direction movement section 36.