Title:
INFORMATION EXCHANGE SYSTEM
Document Type and Number:
Japanese Patent JP2023006188
Kind Code:
A
Abstract:
To provide an information exchange system that enables processing information to be effectively utilized in an inspection performed by an inspection device.SOLUTION: An information exchange system includes a processing device and an inspection device between which information is exchanged. The processing device 2 comprises a chuck table 21 for holding a workpiece, cutting means 22, and processing control means 100. The inspection device 3 comprises a chuck table 32f for holding the workpiece processed by the processing device, inspection means 36, and inspection control means 200. The processing control means comprises an information storage section 110 for identifying a region in which the workpiece is to be processed using an X-coordinate and a Y-coordinate and storing processing information obtained by the processing. The inspection control means extracts processing information corresponding to the X-coordinate and the Y-coordinate of the workpiece imaged by the inspection means from the processing control means.SELECTED DRAWING: Figure 1
Inventors:
ARAO KAZUKI
YAMADA YOHEI
MIYAGAWA SAKI
YAMADA YOHEI
MIYAGAWA SAKI
Application Number:
JP2021108654A
Publication Date:
January 18, 2023
Filing Date:
June 30, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/301; B23Q17/24; B24B27/06; B24B49/10; B24B49/12; H01L21/02
Attorney, Agent or Firm:
Naozumi Ono
Okunuki Sachiko
Tsuyoshi Tsukano
Yoshifumi Kaneko
Okunuki Sachiko
Tsuyoshi Tsukano
Yoshifumi Kaneko