Title:
INFORMATION STORING DEVICE, INFORMATION STORING METHOD, AND MANAGING SYSTEM FOR CYLINDER MECHANISM
Document Type and Number:
Japanese Patent JP2002301638
Kind Code:
A
Abstract:
To provide an information storing device for a cylinder mechanism and an information storing method capable of storing information on operation of a cylinder mechanism in a state to enable effective utilization of the information and to provide a management system for a cylinder mechanism capable of managing the cylinder mechanism by grasping operation information of the cylinder mechanism.
The managing system for the cylinder mechanism comprises a detecting means 111 to detect a signal corresponding to given operation of the cylinder mechanism 130; and an information storing part 106 to store detecting information of the detecting means 111 as time information.
Inventors:
YOSHIMOTO YUJI
KAMIMURA RYOICHI
OGATA KUNIE
DEGUCHI YOICHI
KAMIMURA RYOICHI
OGATA KUNIE
DEGUCHI YOICHI
Application Number:
JP2001105855A
Publication Date:
October 15, 2002
Filing Date:
April 04, 2001
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G01D9/00; B23Q16/02; F16J1/00; H01L21/027; H01L21/68; H01L21/683; (IPC1-7): B23Q16/02; F16J1/00; G01D9/00; H01L21/027; H01L21/68
Domestic Patent References:
| JPH06334018A | 1994-12-02 | |||
| JPH1174170A | 1999-03-16 | |||
| JP2000252179A | 2000-09-14 |
Attorney, Agent or Firm:
Hiroshi Takayama
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