Title:
INFRARED ATTENUATED TOTAL REFLECTANCE TYPE THIN FILM MEASURING INSTRUMENT
Document Type and Number:
Japanese Patent JP3482441
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To increase the absorbance of an infrared ray measured by ATR linearly with respect to a growth film thickness of a thin film by precluding the thin film from growing in an end face of an ATR prism, so as to provide an accurate result.
SOLUTION: In this infrared ATR type thin film measuring instrument of the present invention, the end face of the attenuated total reflectance prism is covered by a holder for measuring the thin film formed with an infrared ray passing hole, in a measuring instrument mounted closely contactingly with the growth thin film of a measured object on the attenuated total reflectance prism having no absorption in an infrared area to conduct chemical analysis for the growth thin film by making the infrared ray get incident into the end face of the attenuated total reflectance prism.
Inventors:
Hiroyuki Fujiwara
Application Number:
JP2001073036A
Publication Date:
December 22, 2003
Filing Date:
March 14, 2001
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
G01B11/06; G01N21/01; G01N21/27; G01N21/35; G01N21/3563; G01N21/552; (IPC1-7): G01N21/27; G01N21/01; G01N21/35
Domestic Patent References:
| JP862125A | ||||
| JP8327533A |