Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
INFRARED DETECTING ELEMENT AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH08288535
Kind Code:
A
Abstract:

PURPOSE: To reduce a thermal stress, which is generated when a hybrid type infrared detecting element is cooled at an operating temperature and is generated in a photodiode part and an epitaxial interface, and to improve the bonding strength of bumps.

CONSTITUTION: As a polysilicon bump 10 doped in a high concentration and an In thin film are used for bump bondings, the bonding strength and electrical conductivity of bumps are high. Moreover, as the flexibility of the bump 10 is low and the thickness of an Si IC 9 is equal with that of an Si substrate 14, a warpage is not generated in a hybrid type infrared detecting element at the time of of cooling of → the hybrid type infrared detecting element. At this time, a thermal stress of the largest thermal stress part 4 is the force of the elastic limit of a CdTe buffer layer 18 and a thermal stress in a photodiode 5 is the degree of half of the force of the elastic limit of an HgCdFe layer. A reinforcing polysilicon bump 12 and a CdTe bump 8 formed on the endmost part of the HgCdTe layer 7 prevent the generation of a local breakdown of the crystal of a photodiode 16 formed at the endmost of an array. Thereby, the highly reliable infrared detecting element can be manufactured at a high yield to a cooling cycle.


Inventors:
KANZAKI MASAYUKI
Application Number:
JP8952595A
Publication Date:
November 01, 1996
Filing Date:
April 14, 1995
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NEC CORP
International Classes:
G01J1/02; H01L21/60; H01L21/603; H01L27/14; H01L27/146; H01L31/02; H01L31/10; (IPC1-7): H01L31/10; G01J1/02; H01L21/603; H01L27/14; H01L27/146; H01L31/02
Attorney, Agent or Firm:
Sugano Naka