Title:
INFRARED DETECTING ELEMENT
Document Type and Number:
Japanese Patent JPH06137938
Kind Code:
A
Abstract:
PURPOSE: To provide a highly sensitive infrared detecting element which exhibits high infrared ray absorbing function with no possibility of fracture due to internal stress.
CONSTITUTION: An infrared detecting part 2 comprising a thin film resistor 11 having resistance variable with heat generated through absorption of infrared ray is provided on a substrate 3 in the infrared detecting element 1, wherein the infrared detecting part 2 is provided with an amorphous silicon carbide layer in order to exhibit infrared ray absorbing function.
Inventors:
NAKAMURA TAKURO
TOMONARI SHIGEAKI
TOMONARI SHIGEAKI
Application Number:
JP28638592A
Publication Date:
May 20, 1994
Filing Date:
October 23, 1992
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01J1/02; G01J5/02; G01J5/20; (IPC1-7): G01J1/02; G01J5/02
Attorney, Agent or Firm:
Takehiko Matsumoto