Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
INFRARED DETECTION DEVICE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2004239708
Kind Code:
A
Abstract:

To provide an infrared detection device and its manufacturing method which improves remarkably infrared detection sensitivity by suppressing heat dissipation from an infrared detection part.

This infrared detection device is constituted of the infrared detection part 31 including a sensor layer 21 for detecting a temperature change caused by infrared incidence, a pair of support legs 32, 33 for supporting in midair the infrared detection part 31, a pair of first electrode layers 22, 23 connected electrically to the sensor layer 21, and second electrode layers 26a 27a arranged on a substrate part 34 separately from the first electrode layers 22, 23 and capacitively coupled respectively with the first electrode layers 22, 23, or the like.


Inventors:
OTA YASUAKI
Application Number:
JP2003027964A
Publication Date:
August 26, 2004
Filing Date:
February 05, 2003
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
G01J1/02; G01J1/42; G01J5/20; G01J5/48; H01L27/14; H01L37/00; (IPC1-7): G01J1/02; G01J1/42; G01J5/20; G01J5/48; H01L27/14; H01L37/00
Attorney, Agent or Firm:
Aoyama Aoi
Osamu Kawamiya