Title:
INFRARED DETECTION ELEMENT, INFRARED DETECTOR AND INFRARED GAS SENSOR
Document Type and Number:
Japanese Patent JP2015075384
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an infrared detection element, an infrared detector and an infrared gas sensor each of which can have increased sensitivity.SOLUTION: An infrared detection element 20a is provided in which a first pyroelectric element 22 and a second pyroelectric element 23 are formed side by side in one pyroelectric substrate 21. The first pyroelectric element 22 includes a first front surface electrode 22a, a first rear surface electrode 22b, and a first part 22c interposed between the first front surface electrode 22a and the first rear surface electrode 22b in the pyroelectric substrate 21. The second pyroelectric element 23 includes a second front surface electrode 23a, a second rear surface electrode 23b, and a second part 23c interposed between the second front surface electrode 23a and the second rear surface electrode 23b in the pyroelectric substrate 21. In the pyroelectric substrate 21, a slit 26 shaped along the outer periphery of the first pyroelectric element 22 is formed in a peripheral part surrounding the first pyroelectric element 22 while bypassing first front surface wiring 24a and first rear surface wiring 24b, and a peripheral part surrounding the second pyroelectric element 23 is continuous throughout along the periphery of the second part 23c.
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Inventors:
WATABE YOSHIFUMI
SUMI SADAYUKI
HOZUMI JUNICHI
SUMI SADAYUKI
HOZUMI JUNICHI
Application Number:
JP2013211463A
Publication Date:
April 20, 2015
Filing Date:
October 08, 2013
Export Citation:
Assignee:
PANASONIC IP MAN CORP
International Classes:
G01J1/02; G01N21/3504; H01L35/22; H01L37/00
Domestic Patent References:
| JPH0518816A | 1993-01-26 | |||
| JP3043381U | 1997-11-18 | |||
| JP2012159450A | 2012-08-23 | |||
| JPH0335128A | 1991-02-15 | |||
| JP2011128015A | 2011-06-30 | |||
| JP2005049171A | 2005-02-24 | |||
| JP2012027010A | 2012-02-09 |
Foreign References:
| US20120318980A1 | 2012-12-20 |
Attorney, Agent or Firm:
Keisei Nishikawa