To provide a small and highly efficient infrared detection element by forming both a resistor of a first infrared detection part and an electrode of a second infrared detection part set on a same face of a substrate of a same conductive material.
A substrate 101 is obtained by cleaving an MgO single crystal at a face of an infrared detection element 100 and polishing a surface to a mirror plane. A pyroelectric type detection part 110 has a lower electrode film 102 of Pt, a pyroelectric body film 103 of PLT and an upper electrode 104 of an Ni film sequentially layered on the substrate 101. On the other hand, a resistor type detection part 120 has a thermal insulating film 105 and a resistor film 108 sequentially layered on the substrate 101. A gap part 107 is formed between each bottom part of the detection parts and the substrate 101, thereby restricting transmission of heat between the detection parts and substrate and enhancing a sensitivity of the detection parts. Moreover, a decrease in mechanical strength of the infrared detection element 100 is restricted to prevent the infrared detection element from being deformed and broken. Further, the thermal insulating film 105 formed to the periphery of both detection parts restricts transmission of heat between the detection parts and the substrate 101. The upper electrode 104 and the resistor film 108 are simultaneously formed of a same material.
TORII HIDEO
TAKAYAMA RYOICHI
