Title:
INFRARED DETECTION ELEMENT AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH05296826
Kind Code:
A
Abstract:
PURPOSE:To enhance the detection sensitivity and the response speed of the detection element and to enhance the support strength of an infrared detection part by a method wherein a reinforcement film which surrounds the infrared detection part and which is situated away from the infrared detection part is arranged. CONSTITUTION:The lower part of an infrared detection part 3 in a silicon substrate 1 is removed; a heat isolation space 10 is formed; in addition, a reinforcement film 4 which surrounds the detection part 3 on an insulating film 2 and which is situated away from the detection part 3 is formed. Thereby, the strength of the insulating film 2 can be increased, and the sensitivity and the response speed of the detection part 3 are not lowered because the reinforcement film 4 is situated away from the detection part 3. In addition, when a protective film 33 is formed, the reinforcement film 4 is formed at the same time. As a result, the reinforcement film 4 can be formed without increasing a manufacturing process additionally.
Inventors:
KAMIYA FUMIHIRO
IGARI MOTOO
HIMESAWA HIDEKAZU
IGARI MOTOO
HIMESAWA HIDEKAZU
Application Number:
JP10338092A
Publication Date:
November 12, 1993
Filing Date:
April 23, 1992
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01J1/02; G01J5/02; H01L37/02; (IPC1-7): G01J1/02; G01J5/02; H01L37/02
Attorney, Agent or Firm:
Ishida Chochichi (2 outside)