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Title:
赤外線検知素子
Document Type and Number:
Japanese Patent JP4896515
Kind Code:
B2
Abstract:

To provide an infrared detecting element where an infrared detection property is kept to be favorable by improving an infrared absorption rate of an infrared absorption membrane even if the thickness of the infrared absorption membrane formed on a membrane is ≥3μm.

In the infrared detecting element having the membrane formed on a diaphragm structure of a silicon substrate and the infrared absorption layer composed of an evaporative deposition object of metallic particles formed on the membrane, the infrared absorption layer has a first metallic black membrane formed on the surface of the membrane and a second metallic black membrane formed on the first metallic black membrane. In the first metallic black membrane, infrared transmission is lower and a reflection factor is higher than those in the second metallic black membrane.

COPYRIGHT: (C)2007,JPO&INPIT


Inventors:
Kuniyuki Hishinuma
Application Number:
JP2005373266A
Publication Date:
March 14, 2012
Filing Date:
November 28, 2005
Export Citation:
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Assignee:
Seiko npc Co., Ltd.
International Classes:
H01L37/00; G01J1/02; G01J5/10; H01L35/32
Domestic Patent References:
JP2005315723A
JP55017104B1
JP6307929A
JP2001074549A