Title:
赤外線検出素子および赤外線2次元イメージセンサ
Document Type and Number:
Japanese Patent JP4612932
Kind Code:
B2
Abstract:
An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.
Inventors:
Kazuhiko Hashimoto
Tomonori Mukaikawa
Kubo Ryuichi
Hiroyuki Kishihara
Minoru Noda
Masanori Okuyama
Tomonori Mukaikawa
Kubo Ryuichi
Hiroyuki Kishihara
Minoru Noda
Masanori Okuyama
Application Number:
JP2000164689A
Publication Date:
January 12, 2011
Filing Date:
June 01, 2000
Export Citation:
Assignee:
Hochiki Corporation
Masanori Okuyama
Masanori Okuyama
International Classes:
G01J1/02; G01J5/34; G01J5/48; H01L21/306; H01L27/14; H01L37/02; H04N5/33
Domestic Patent References:
| JP11271142A | ||||
| JP10038677A | ||||
| JP3212979A | ||||
| JP10062242A | ||||
| JP2000164946A | ||||
| JP11271141A | ||||
| JP7043215A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yutaka Horii
Masayuki Sakai
Toshio Morita
Yutaka Horii
Masayuki Sakai