INFRARED DETECTOR, AND INFRARED SOLID IMAGING DEVICE

Title:

INFRARED DETECTOR, AND INFRARED SOLID IMAGING DEVICE

Document Type and Number:

Japanese Patent JP2006300816

Kind Code:

A

Abstract:

To provide an infrared detector generating no inclination in a detection part or the like by an internal stress, and also to provide an infrared solid imaging device including the same.

This substantially rectangular infrared detector for detecting a temperature change of the detection part by a detection film includes: a substrate; the detection part provided with the detection film; a support leg for supporting the detection part on the substrate; and a wiring layer provided in the support leg and connected to the detection film. The infrared detector has a structure to bring the support leg into a condition axisymmetric to a normal to a substrate surface, in an intersection of diagonal lines of the infrared detector. The infrared solid imaging device includes the infrared detectors arranged matrixlikely.

Inventors:

OTA YASUAKI
NAKAGI YOSHIYUKI

Application Number:

JP2005124994A

Publication Date:

November 02, 2006

Filing Date:

April 22, 2005

Export Citation:

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Assignee:

MITSUBISHI ELECTRIC CORP

International Classes:

G01J1/02; H01L27/14; H01L31/02; H01L35/32; H01L37/00; H01L37/02; H01L37/04; H04N5/33

Domestic Patent References:

JP2000321125A	2000-11-24
JP2003224260A	2003-08-08
JPH08285680A	1996-11-01

Foreign References:

WO1999031471A1

1999-06-24

Attorney, Agent or Firm:

Osamu Kawamiya
Takuji Yamada
Haruo Nakano

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