Title:
INFRARED DETECTOR
Document Type and Number:
Japanese Patent JPH0590648
Kind Code:
A
Abstract:
PURPOSE:To see that discharge phenomena do not occur when polling the pyroelectric material to become an infrared detector by making the area of the lower electrode on a semiconductor substrate different from that of the upper electrode. CONSTITUTION:An electrode wiring pattern 12 consisting of metal is made in the specified position on a semiconductor substrate 11. And an infrared detector comprising a lower electrode 13, a pyroelectric material, and an upper electrode 15 is made, and the end of the lower electrode 13 is connected to the electrode wiring pattern 12. In such constitution, it is made so that the area of the lower electrode 13 is smaller than that of the upper electrode 15. Hereby, the polling of the infrared detector can be performed without causing discharge, and a very efficient infrared detector can be gotten.
Inventors:
SHIBAYAMA KATSUMI
TANAKA AKIMASA
TANAKA AKIMASA
Application Number:
JP25230591A
Publication Date:
April 09, 1993
Filing Date:
September 30, 1991
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
H01L27/14; H01L37/02; (IPC1-7): H01L27/14; H01L37/02
Domestic Patent References:
| JPS6355450B2 | 1988-11-02 | |||
| JPH02230769A | 1990-09-13 |
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)
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