PURPOSE: To obtain an infrared detector in which the thermal capacity is reduced by employing a thin film infrared detection element while realizing high response and high sensitivity through reduction of thermal conduction between the infrared detection element and a read out circuit.
CONSTITUTION: An infrared detection element comprising pyroelectrics arranged in an array is supported, in the center of the lower electrodes 71-74 thereof, from a read out circuit 1 by means of a columnar wiring material, e.g. a columnar polysilicon, having smaller cross-sectional area than the infrared detection element with the resistance thereof being decreased through introduction of impurities thus isolating the infrared detection element thermally from the read out circuit. The columnar polysilicon 21-24 is coated, on the side face thereof, with silicon nitride 3 for the purpose of protection. A unit comprising four two-dimensionally contiguous infrared detection elements is provided commonly, in the center thereof, with means for connecting the upper electrodes of four infrared detection elements with the read out circuit and the four infrared detection elements are supported at five points by individual connecting means and a common connecting means.
DAIKU HIROSHI
DOI SHOJI
