Title:
INFRARED LIGHT DETECTOR ELEMENT
Document Type and Number:
Japanese Patent JPH05203488
Kind Code:
A
Abstract:
PURPOSE:To obtain an infrared light detector element capable of detecting infrared light with high sensitivity by raising the absorption rate of infrared light without causing any problem in strength of an infrared absorption film and producability, etc. CONSTITUTION:An infrared light detector element is provided with an infrared light detector part 2 having an infrared absorption film 3 on one surface of a base plate 1. The infrared absorption film 3 is constituted of three infrared absorption film layers consisting of two low refractance infrared light absorber film layers 3a and 3c and in between them, a higher refractance film layer 3b than the two.
Inventors:
HIMESAWA HIDEKAZU
IGARI MOTOO
KAMIYA FUMIHIRO
IGARI MOTOO
KAMIYA FUMIHIRO
Application Number:
JP1237592A
Publication Date:
August 10, 1993
Filing Date:
January 27, 1992
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01J1/02; G01J5/02; G01J5/20; H01L37/00; (IPC1-7): G01J1/02; G01J5/02; H01L37/00
Attorney, Agent or Firm:
Hiroyuki Nakai