Title:
INFRARED-RAY SENSOR
Document Type and Number:
Japanese Patent JPH05164605
Kind Code:
A
Abstract:
PURPOSE:To obtain an infrared-ray sensor, which can be readily manufactured in the compact configuration, can suppress the outflow of heat from an infrared- ray sensing part into a substrate and has the excellent sensitivity and response in detection of the infrared rays. CONSTITUTION:An infrared-ray sensing part 2 is provided on the surface of a substrate 1 in an infrared-ray sensor. A heat separating par 5 for suppressing the heat conduction between the infrared-ray sensing part 2 and the substrate 1 is formed at a position beneath the infrared-ray sensing part 2 of the substrate 1. The infrared-ray sensing part 2 is supported with the single-layer film of a silicon oxide film 4.
Inventors:
HIMESAWA HIDEKAZU
IGARI MOTOO
AIZAWA KOICHI
IGARI MOTOO
AIZAWA KOICHI
Application Number:
JP35211291A
Publication Date:
June 29, 1993
Filing Date:
December 12, 1991
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01J1/02; G01J5/02; G01J5/20; H01L37/00; (IPC1-7): G01J1/02; G01J5/02; H01L37/00
Attorney, Agent or Firm:
Hiroyuki Nakai