Title:
INFRARED RAY SENSOR
Document Type and Number:
Japanese Patent JPH05332828
Kind Code:
A
Abstract:
PURPOSE:To achieve a reliable infrared ray sensor which can be manufactured in a mass, inexpensively with a simple process without damaging an infrared ray detection element and with less thermal loss to a substrate and can perform high-sensitivity infrared ray detection. CONSTITUTION:A lower crystal glass substrate 11 in that the upper surface is mirror-surface finished and a groove 12 is formed at the center and an upper crystal glass substrate 13 where the rear surface is mirror-surface finished are adhered and joined while the mirror surfaces oppose each other via a gap G of the groove 12 and then an infrared ray detection element 14 consisting of a sandwich structure of a lower electrode 15, a pyroelectric film 16, and an upper electrode 17 is formed and laid out on the surface of the upper crystal glass substrate 13.
Inventors:
KATO ATSUYUKI
Application Number:
JP15738892A
Publication Date:
December 17, 1993
Filing Date:
May 26, 1992
Export Citation:
Assignee:
YAMATAKE HONEYWELL CO LTD
International Classes:
G01J1/02; G01J5/02; G01J5/34; H01L37/02; (IPC1-7): G01J1/02; G01J5/02; H01L37/02
Attorney, Agent or Firm:
Masaki Yamakawa