To provide an infrared sensor which prevents an infrared absorption film from being electrically charged and has high infrared detection sensitivity and to provide an infrared sensor array.
An infrared sensor 100 for detecting infrared rays comprises: a substrate 1 having a recessed part 2; a temperature detection part 3 which is supported on the recessed part 2 by a supporting leg 4 connected to the substrate 1 and includes a detection element 6; and an infrared absorption part 7 which is placed on the temperature detection part 3, includes an infrared absorption metal film 12, and comprises an umbrella part 17 parallel to a surface of the substrate 1 and a joint part 14 where the umbrella part 17 is joined to the temperature detection part 3. The infrared absorption metal film 12 of the umbrella part 17 and the infrared absorption metal film 12 of the joint part 14 are electrically insulated, or the infrared absorption metal film 12 is not provided at least at a part, joined to a surface of the temperature detection part 3, of the joint part 14.
OZASAYAMA YASUHIRO
| JP2006220555A | 2006-08-24 | |||
| JP2003065842A | 2003-03-05 |
Mitsuo Tanaka
Mikio Takeuchi
Haruo Nakano