PURPOSE: To make the detecting part of a thin film portion hard to crack by increasing the strength while realizing the fast response and higher sensitivity of an element.
CONSTITUTION: A support pole 3 is formed on a reading circuit and inside the support pole 3 while a conductor pole 4 made to contact the reading circuit is formed to be supported on the support pole 3. A bridge component film 2 is formed having an opening part and a cut part 7 where the conductor pole 4 is exposed. Support films 9 and 10 are formed with the cut part 7 to link the support pole 3 to the bridge component film 2 and an electrode 6 is formed contacting the conductor pole 4 at the opening part. A bolometer material film 1 is formed on the bridge component film 2 between the electrodes 6, an infrared absorption film is formed on the bolometer material film 1 and a hollow part connected to the cut part 7 is formed between the reading circuit and the bridge component film 2.
DAIKU HIROSHI
DOI SHOJI
