To provide an infrared sensor whose support part having an infrared detector is positioned at a place facing to a recess and is prevented from adhering to a bottom of the recess.
An infrared sensor includes: a substrate 2; an insulating film 14 which is installed on the substrate 2 and which includes a recess 15 surrounding a cavity 17; a support part 23 which is supported by a beam 22 whose one end is fixed to the substrate 2 and which is positioned at a place facing to the cavity 17; and an infrared detector 4 which is installed on the support part 23 and which detects infrared. The recess 15 is covered by a water-repellent film 16 including polysilicon, and the beam 22 and the support part 23 include a silicon nitride or a silicon carbonitride.
| JP2010127657A | 2010-06-10 | |||
| JP2011153853A | 2011-08-11 | |||
| JP2006099073A | 2006-04-13 | |||
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Osamu Suzawa
Kazuhiko Miyasaka