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Title:
INFRARED SENSOR
Document Type and Number:
Japanese Patent JP2011179953
Kind Code:
A
Abstract:

To provide an infrared sensor having a structure using a pyroelectric element, and thinned.

The thin-film pyroelectric element 14, made of lead zirconate titanate, is provided on a silicon substrate 2 and can be formed by a sol-gel method. The sol-gel method can reduce a thickness of the pyroelectric element 14 in comparison with a method for forming the pyroelectric element 14 by sintering a powder raw material.


Inventors:
NAKAYA GORO
Application Number:
JP2010044180A
Publication Date:
September 15, 2011
Filing Date:
March 01, 2010
Export Citation:
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Assignee:
ROHM CO LTD
International Classes:
G01J1/02; G01J5/12; G01J5/34; G01J5/48; H01L37/02
Domestic Patent References:
JPS6355450U1988-04-13
JPH06283766A1994-10-07
JP2008232896A2008-10-02
JPH04357891A1992-12-10
JPH11271141A1999-10-05
JP2003344155A2003-12-03
JP2003133602A2003-05-09
JP2007309877A2007-11-29
JPH11344377A1999-12-14
JP2008232863A2008-10-02
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki



 
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