To provide an infrared sensor allowing high sensitivity and high response speed and capable preventing deformation of a support part due to stress of the support part.
The infrared sensor includes a base substrate 1, a temperature detection part 3 absorbing infrared rays and detecting temperature variation by the absorption, and a heat insulation part 4 supporting the temperature detection part 3 so that the temperature detection part 3 is separated from one surface of the base substrate 1 and performing heat insulation between the temperature detection part 3 and the base substrate 1. The heat insulation part 4 includes a support part 41 which is separated from the one surface of the base substrate 1 and on which the temperature detection part 3 is formed on a side reverse to the side of the base substrate 1 and leg parts 42, 42 connecting the support part 41 and the base substrate 1. In the heat insulation part 4, the support part 41 and the leg parts 42, 42 are formed of a porous material, and stress relaxation layers 41b, 41c for relaxing the stress of the support part 41 are stacked on the support part 41 in a form for holding the support part 41 in between.
COPYRIGHT: (C)2008,JPO&INPIT
Koji Tsuji
Masao Kirihara
Takaaki Yoshihara
Satoshi Hyodo
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