To provide an infrared sensor with high performance.
The infrared sensor comprises a base board 1, a temperature detection part 3 which absorbs infrared rays and detects a temperature change due to the absorption, and a heat insulation part 4 which supports the temperature detection part 3 so that the temperature detection part 3 is arranged spacing from one surface of the base board 1 and heat-insulates the temperature detection part 3 and the base board 1. The heat insulation part 4 has a support part 41 which is arranged spacing from the one surface of the base board 1 and on which the temperature detection part 3 is formed on the opposite side of the base board 1 side, and leg parts 42, 42 connecting the support part 41 and the base board 1. In the heat insulation part 4, the support part 41 and the leg parts 42, 42 are made of a porous material, and a plurality of holes 41b penetrating the support part 41 in the thickness direction are formed on the support part 41.
COPYRIGHT: (C)2008,JPO&INPIT
Koji Tsuji
Masao Kirihara
Takaaki Yoshihara
Satoshi Hyodo
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