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Title:
赤外線固体撮像素子
Document Type and Number:
Japanese Patent JP3987379
Kind Code:
B2
Abstract:

To provide an infrared solid-state image pickup element of which the resolution is improved without increasing the actual number of pixels.

In an infrared sensor, an infrared absorbing part is supported on a temperature detector. A plurality of the infrared sensors are two- dimensionally arranged on a semiconductor substrate to form the infrared solid- state image pickup element. The infrared solid-state image pickup element comprises the semiconductor substrate, the temperature detectors arranged in a matrix at specific pixel pitches each in the direction of rows and in the direction of columns which intersect each other at right angles on the semiconductor substrate; and the infrared absorbers each supported on the temperature detectors by supporting parts. The infrared absorbers in the even-numbered columns are arranged in such a way as to be displaced by the amount of displacement within the pixel pitch in the direction of the rows to the infrared absorbers provided in the odd-numbered columns.

COPYRIGHT: (C)2004,JPO


Inventors:
Takehisa Munehisa
Yoshiyuki Nakagi
Masafumi Kimata
Application Number:
JP2002154238A
Publication Date:
October 10, 2007
Filing Date:
May 28, 2002
Export Citation:
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Assignee:
Mitsubishi Electric Corporation
International Classes:
G01J1/02; G01J1/42; G01J5/02; G01J5/20; H01L27/14; H01L37/00; H04N5/33; H04N5/335; H04N5/349; H04N5/369
Domestic Patent References:
JP10209418A
JP59128876A
JP6077450A
JP2000205945A
Attorney, Agent or Firm:
Aoyama Aoi
Takuji Yamada
Haruo Nakano